Effect of the sputtering parameters on the growth and piezoelectric properties of zinc oxide thin films

被引：0
|
作者：
Kutepova, VP [1 ]
Hall, DA [1 ]
机构：
[1] Univ Manchester, Ctr Mat Sci, Manchester M1 7HS, Lancs, England
来源：
1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2 | 1998年
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D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper the potential of zinc oxide (ZnO) thin films as a piezoelectric material for surface acoustic wave (SAW) sensor developments is discussed. ZnO thin films were deposited by RF magnetron sputtering onto Al/SiO2/Si substrate. In highly oriented, transparent films lattice stress could be reduced sufficiently by varying the sputtering pressure and substrate temperature and by the careful selection of the other sputtering parameters. Availability of these structures for SAW device applications has been demonstrated by producing an electrode structure of a one-port resonator. The design and performance of resonators, based on ZnO films is described.
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页码：213 / 216
页数：4
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