Directed self-assembly of block copolymers for universal nanopatterning

被引:57
|
作者
Kim, Bong Hoon [1 ]
Kim, Ju Young [1 ]
Kim, Sang Ouk [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Ctr Nanomat & Chem React, Inst for Basic Sci, Taejon 305701, South Korea
关键词
LARGE-AREA; LITHOGRAPHY; GRAPHOEPITAXY; GRAPHENE; ARRAYS; PATTERNS; NANOSTRUCTURES; FABRICATION; TEMPLATES;
D O I
10.1039/c2sm27535j
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Block copolymers (BCP) are self-assembling polymeric materials that have been extensively investigated for several decades. Recently, directed self-assembly (DSA) of BCPs has received enormous research attention from both academia and industry as next-generation nanolithography technology. This article provides a brief introduction to (i) the spontaneous and directed self-assembly of BCPs, (ii) the orientation and lateral ordering of BCP nanopatterns and their relationships with DSA strategies, (iii) various potential applications of BCP nanopatterning, and (iv) mussel-inspired BCP nanopatterning for arbitrary substrate materials including low surface energy materials.
引用
收藏
页码:2780 / 2786
页数:7
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