3D Micro-Fabricated High-Q 140 GHz Filter

被引：0

作者：

David, Francois ^{[1
]}

Dalmay, Claire ^{[1
]}

Chatras, Matthieu ^{[1
]}

Pothier, Arnaud ^{[1
]}

Carpentier, Ludovic ^{[2
]}

Lapierre, Luc ^{[2
]}

Blondy, Pierre ^{[1
]}

机构：

[1] Univ Limoges, CNRS, UMR 7252, XLIM, F-87060 Limoges, France

[2] French Space Agcy, CNES, F-31400 Toulouse, France

来源：

2017 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS) | 2017年

关键词：

Band-pass filter; millimeter-wave applications; additive micro fabrication;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper introduces a new fabrication process for the realization of cavity resonators and band pass filters, using additive micro fabrication. 3D air-filled structures with a 195 mu m thickness are obtained by using successive electroplating. Thanks to this fabrication process, a 140 GHz cavity resonator with an unloaded quality factor of 511 has been fabricated. A four-pole band pass filter at 140 GHz is presented, with a 3.1% bandwidth at -3 dB, and measured 3.7 dB in-band loss. Measurements are in good agreement with HFSS simulations without any post-processing tuning.

引用

页码：1293 / 1295

页数：3

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