Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes

被引：97

作者：

Schropp, A. ^{[1
]}

Hoppe, R. ^{[1
]}

Patommel, J. ^{[1
]}

Samberg, D. ^{[1
]}

Seiboth, F. ^{[1
]}

Stephan, S. ^{[1
]}

Wellenreuther, G. ^{[2
]}

Falkenberg, G. ^{[2
]}

Schroer, C. G. ^{[1
]}

机构：

[1] Tech Univ Dresden, Inst Struct Phys, D-01062 Dresden, Germany

[2] Deutsch Elektronen Synchrotron DESY, D-22607 Hamburg, Germany

来源：

APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 25期

关键词：

D O I：

10.1063/1.4729942

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate x-ray scanning coherent diffraction microscopy (ptychography) with 10 nm spatial resolution, clearly exceeding the resolution limits of conventional hard x-ray microscopy. The spatial resolution in a ptychogram is shown to depend on the shape (structure factor) of a feature and can vary for different features in the object. In addition, the resolution and contrast are shown to increase with increasing coherent fluence. For an optimal ptychographic x-ray microscope, this implies a source with highest possible brilliance and an x-ray optic with a large numerical aperture to generate the optimal probe beam. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4729942]

引用

页数：3

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