Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

被引：7
|
作者：
Llobet, J. [1 ]
Sansa, M. [1 ]
Lorenzoni, M. [1 ]
Borrise, X. [2 ]
Paulo, A. San [3 ]
Perez-Murano, F. [1 ]
机构：
[1] CSIC, CNM, Inst Microelect Barcelona, Bellaterra 08193, Spain
[2] Inst Catala Nanociencia & Nanotecnol ICN2, Bellaterra 08193, Spain
[3] CSIC, Inst Microelect Madrid, Madrid 28760, Spain
来源：
APPLIED PHYSICS LETTERS | 2015年 / 107卷 / 07期
关键词：
OSCILLATOR; RESOLUTION; NANOWIRES; SYSTEMS; SENSOR;
D O I：
10.1063/1.4928709
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effect of geometrical asymmetries on the piezoresistive transduction in suspended double clamped beam nanomechanical resonators is investigated. Tapered silicon nano-beams, fabricated using a fast and flexible prototyping method, are employed to determine how the asymmetry affects the transduced piezoresistive signal for different mechanical resonant modes. This effect is attributed to the modulation of the strain in pre-strained double clamped beams, and it is confirmed by means of finite element simulations. (C) 2015 AIP Publishing LLC.
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页数：5
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