Novel devices based on the combination of nitride and II-VI materials

被引:2
|
作者
Murai, A [1 ]
Kruse, C
McCarthy, L
Mishra, UK
DenBaars, SP
Hommel, D
机构
[1] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
[2] Univ Calif Santa Barbara, ECE Dept, Santa Barbara, CA 93106 USA
[3] Univ Bremen, Inst Solid State Phys, D-28359 Bremen, Germany
[4] Univ Calif Santa Barbara, ERATO, JST, UCSB Grp, Santa Barbara, CA 93106 USA
关键词
D O I
10.1002/pssa.200565429
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We demonstrate the direct wafer bonding of GaN and ZnSe-based materials. We report on the structural, optical, and electrical characteristics of InGaN/GaN light-emitting diodes (LEDs) and ZnSe-based II-VI materials combined by direct wafer bonding. Reflectivity, transmission electron microscopy (TEM), and current-voltage (I-V) measurements were performed. The bonded sample exhibited a higher reflectivity at the wavelength of 510 nm than a control LED with an Al cap. Cross-sectional TEM revealed a uniform wafer-bonded interface with no voids or cavities for the low temperature sample, while the sample bonded at a higher temperature was observed to have lens-shaped cavities at semiconductor interfaces. (c) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:1771 / 1777
页数:7
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