Silicon bulk micromachined vibratory gyroscope for microspacecraft

被引：12
|
作者：
Tang, TK [1 ]
Gutierrez, RC [1 ]
Wilcox, JZ [1 ]
Stell, C [1 ]
Vorperian, V [1 ]
Dickerson, M [1 ]
Goldstein, B [1 ]
Savino, JL [1 ]
Li, WJ [1 ]
Calvet, R [1 ]
Charkaborty, I [1 ]
Bartman, R [1 ]
Kaiser, WJ [1 ]
机构：
[1] CALTECH,JET PROP LAB,MICRODEVICES LAB,PASADENA,CA 91109
来源：
SPACE SCIENCECRAFT CONTROL AND TRACKING IN THE NEW MILLENNIUM | 1996年 / 2810卷
关键词：
microgyroscope; gyroscope; rotation rate sensor; vibratory gyroscope; navigation; silicon micromachining;
D O I：
10.1117/12.255129
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
引用
收藏
页码：101 / 115
页数：15
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