Sputter synthesis of ferroelectric films and heterostructures

被引：34
|
作者：
Auciello, O
Kingon, AI
Krupanidhi, SB
机构：
来源：
MRS BULLETIN | 1996年 / 21卷 / 06期
关键词：
D O I：
10.1557/S0883769400046042
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：25 / 30
页数：6
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