An XYZ Micromanipulator with three translational degrees of freedom

被引:47
|
作者
Jensen, Kimberly A. [1 ]
Lusk, Craig P. [1 ]
Howell, Larry L. [1 ]
机构
[1] Brigham Young Univ, Dept Mech Engn, Provo, UT 84602 USA
关键词
XYZ Micromanipulator; three inputs; translational DOFs;
D O I
10.1017/S0263574705002134
中图分类号
TP24 [机器人技术];
学科分类号
080202 ; 1405 ;
摘要
This paper introduces a three degree of freedom XYZ Micromanipulator (XYZM) that is fabricated in the x-y plane and positions components in the x, y, and z directions using three independent linear inputs. The mechanism positions components on a platform using three legs, each composed of a slider mechanism and a parallelogram mechanism. Three versions of the XYZM were fabricated and tested using surface micromachining processes: the rigid-body, offset, and compliant XYZM. Slider displacements of 45 micrometers result in a predicted out-of-plane displacement of 188 micrometers for the rigid-body XYZM, 205 micrometers for the offset XYZM, and 262 micrometers for the compliant XYZM.
引用
收藏
页码:305 / 314
页数:10
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