Focused Ion Beam Treatment of ZnO Nanowires in the Scanning Electron Microscope

被引：0
|
作者：
Shmavonyan, G. Sh. [1 ]
机构：
[1] State Engn Univ Armenia, Yerevan, Armenia
来源：
JOURNAL OF CONTEMPORARY PHYSICS-ARMENIAN ACADEMY OF SCIENCES | 2008年 / 43卷 / 02期
关键词：
nanowire; scanning electron microscope; focused ion beam;
D O I：
10.3103/S1068337208020084
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We investigated vapor phase epitaxy-grown ZnO nanowires on a Si substrate by scanning electron microscopy. These investigations show that there are single nanowires and ensembles of nanowires, among which we found straight and bend, perfect and non-perfect nanowires, as well as nanowires with clean surfaces and surfaces with the dark spots and features. After focused ion beam polishing and milling we found that nanowires are homogeneous. The sizes of the nanowires were determined: the length is about 2-24 mu m, and the width and height are about 200-500 nm.
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收藏
页码：86 / 90
页数：5
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