Dynamic probe calibration using laser interferometry

This paper describes three systems for dynamic probe calibrations which are in use at the Van Swinden Laboratory of the Netherlands Measurements Institute (NMi-VSL). The systems have in common that they enable both static and dynamic probe calibration using a laser interferometer. In two cases displacements are generated using piezo-electric devices and a third system directly reads a probe displacement of a roundness tester by laser interferometry. Measurements are shown which illustrate the capabilities of the systems to characterize and calibrate fast-moving probes.