Piezo-resistive Ring-shaped AFM Sensors with Piconewton Force Resolution

被引：0
|
作者：
Xiong, Z. [1 ]
Walter, B. [1 ]
Mairiaux, E. [1 ]
Faucher, M. [1 ]
Buchaillot, L. [1 ]
Legrand, B. [1 ]
机构：
[1] IEMN, CNRS, UMR 8520, Inst Elect Microelect & Nanotechnol,Grp NAM6, Villeneuve Dascq, France
来源：
2012 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) | 2012年
关键词：
ring resonator; piezo-resistive detection; AFM;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new concept of Atomic Force Microscope (AFM) oscillating probes using electrostatic excitation and piezo-resistive detection is presented. The probe is characterized by electrical methods in a vacuum chamber and by mechanical methods in air. The frequency-mixing measurement technique is developed to reduce the parasitic signal level. These probes resonant in the 1MHz range and the quality factor is measured about 53,000 in vacuum and 3,000 in air. The ring probe is mounted onto a commercial AFM set-up and the surface topography of PMMA sample (2 mu m square) is obtained. The force resolution deduced from the measurements is about 10 pN/Hz(0.5).
引用
收藏
页码：184 / 189
页数：6
相关论文
共 50 条
  • [1] CONCEPTION AND FABRICATION OF PIEZO-RESISTIVE RING-SHAPED AFM PROBES
    Xiong, Z.
    Walter, B.
    Mairiaux, E.
    Faucher, M.
    Buchaillot, L.
    Legrand, B.
    2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
  • [2] CONCEPTION AND FABRICATION OF SILICON RING RESONATOR WITH PIEZO-RESISTIVE DETECTION FOR FORCE SENSING APPLICATIONS
    Xiong, Zhuang
    Walter, Benjamin
    Mairiaux, Estelle
    Faucher, Marc
    Buchaillot, Lionel
    Legrand, Bernard
    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2011, VOL 11, 2012, : 517 - 521
  • [3] Current Excitation Method for ΔR Measurement in Piezo-Resistive Sensors With a 0.3-ppm Resolution
    Gilda, Neena A.
    Nag, Sudip
    Patil, Sheetal
    Baghini, Maryam Shojaei
    Sharma, Dinesh Kumar
    Rao, V. Ramgopal
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2012, 61 (03) : 767 - 774
  • [4] Measuring bite force in small mammals with a piezo-resistive sensor
    Freeman, Patricia W.
    Lemen, Cliff A.
    JOURNAL OF MAMMALOGY, 2008, 89 (02) : 513 - 517
  • [5] Passive Resistance Network Temperature Compensation for Piezo-Resistive Pressure Sensors
    Lei, Cheng
    Liu, Yuqiao
    Liang, Ting
    Tang, Mengxuan
    Ghaffar, Abdul
    Musavi, Sayed Hyder Abbas
    ELECTRONICS, 2025, 14 (04):
  • [6] SHEAR FORCE DETECTOR USING PIEZO-RESISTIVE BEAMS WITH SIDEWALL-DOPING
    Takahashi, H.
    Nakai, A.
    Matsumoto, K.
    Shimoyama, I.
    2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
  • [7] Piezo-resistive pressure sensors in CVD-diamond for high temperature applications
    Otterbach, R
    Hilleringmann, U
    FIFTH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION AND CONTROL TECHNOLOGY, 2003, 5253 : 381 - 384
  • [8] Sensitivity Enhancement of Polysilicon Piezo-resistive Pressure Sensors with Phosphorous Diffused Resistors
    Sivakumar, K.
    Dasgupta, N.
    Bhat, K. N.
    Natarajan, K.
    INTERNATIONAL MEMS CONFERENCE 2006, 2006, 34 : 216 - 221
  • [9] HIGH SENSITIVITY ISOMETRIC FORCE TRANSDUCERS MADE WITH PIEZO-ELECTRIC OR PIEZO-RESISTIVE STRAIN GAUGES
    CHAPMAN, RA
    JOURNAL OF PHYSIOLOGY-LONDON, 1970, 210 (01): : P4 - &
  • [10] Towards the limits in detecting low-level strain with multiple piezo-resistive sensors
    Puers, R
    Claes, W
    Sansen, W
    De Cooman, M
    Duyck, J
    Naert, I
    SENSORS AND ACTUATORS A-PHYSICAL, 2000, 85 (1-3) : 395 - 401
12345