Phase retrieval applied to coherent Fourier scatterometry using the extended ptychographic iterative engine

被引：4
|
作者：
Dwivedi, P. [1 ]
Sakamoto, J. E. H. Cardoso [1 ]
Pereira, S. F. [1 ]
机构：
[1] Delft Univ Technol, Fac Appl Sci, Dept Imaging Phys, Opt Res Grp, Lorentzweg 1, NL-2628 CJ Delft, Netherlands
来源：
OSA CONTINUUM | 2019年 / 2卷 / 05期
关键词：
ELECTRON-DIFFRACTION; RECONSTRUCTION; ALGORITHM;
D O I：
10.1364/OSAC.2.001590
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have demonstrated that the extended ptychographic iterative engine (ePIE) algorithm can be applied to retrieve the phase information of the vectorial scattered field of a subwavelength object with the amplitude of the scattered field as input. We applied this technique combined with coherent Fourier scatterometry to determine the phase of the scattered field of a subwavelength grating, illuminated by a focused laser beam. (c) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码：1590 / 1599
页数：10
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