Efficient curvilinear coordinate method for grating diffraction simulation

被引:13
|
作者
Shcherbakov, Alexey A. [1 ]
Tishchenko, Alexandre V. [2 ]
机构
[1] Moscow Inst Phys & Technol, Lab Nanoopt & Plasmon, Dolgoprudnyi 141707, Russia
[2] Univ St Etienne, Lab Hubert Curien, F-42000 St Etienne, France
来源
OPTICS EXPRESS | 2013年 / 21卷 / 21期
基金
俄罗斯基础研究基金会;
关键词
GENERALIZED SOURCE METHOD; COUPLED-WAVE METHOD; TM POLARIZATION;
D O I
10.1364/OE.21.025236
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The article presents a new method for rigorous simulation of the light diffraction on one-dimensional gratings. The method is capable to solve metal-dielectric structures in linear time and consumed memory with respect to structure complexity. Exceptional performance and convergence for metal gratings are achieved by implementing a curvilinear coordinate transformation into the generalized source method previously developed for dielectric gratings. (C) 2013 Optical Society of America
引用
收藏
页码:25236 / 25247
页数:12
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