Effect of Al Content on Structure and Properties of Ti1-xAlxN Hard Film Prepared by Multi-arc Ion Plating

被引：4

作者：

Lu, Long ^{[1
,2
]}

Feng, Guangguang ^{[3
]}

Ren, Minghao ^{[3
]}

Zhang, Huixia ^{[1
]}

Lyu, Sungki ^{[4
]}

机构：

[1] Huaihai Inst Technol, Coll Mech Engn, Lianyungang 222005, Jiangsu, Peoples R China

[2] Chongqing Univ, State Key Lab Mech Transmiss, Chongqing 400044, Peoples R China

[3] Jiangsu Univ Sci & Technol, Dept Mat, Zhenjiang 212003, Jiangsu, Peoples R China

[4] Gyeongsang Nati Univ, Sch Mech & Aerosp Eng, ReCAPT K MEM R&D Cluster, Jinju 660701, South Korea

来源：

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING | 2013年 / 14卷 / 01期

关键词：

Multi-arc ion plating; Ti1-xAlxN; Al content; WEAR; DEPOSITION; COATINGS; GEAR; ALUMINUM; MODEL;

D O I：

10.1007/s12541-013-0022-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The compound technology of ion nitriding and multi-arc ion plating is adopted to make Ti1-xAlxN film on 40 Cr. The influence of Al content to the structure and functions of film is analyzed through SEM (Scanning Electron Telescope), XRD analyzer, micro hardness tester and scratch tester. It indicated that the Al content has obvious influence on the structure and function of film. The more Al content, the more droplets in the film. Phase structure tends to multiphase composite structures. The micro hardness and bonding force will be increased first, and then decreased with the rising Al content.

引用

页码：161 / 164

页数：4

共 50 条

[1] Effect of Al content on structure and properties of Ti1−xAlxN hard film prepared by multi-arc ion plating
Long Lu
Guangguang Feng
Minghao Ren
Huixia Zhang
Sungki Lyu
International Journal of Precision Engineering and Manufacturing, 2013, 14 : 161 - 164
[2] Characteristic of TiN Film Prepared by Multi-arc Ion Plating
Hou, Shunqiang
Dai, Jingjie
Song, Xing
Song, Yuanyuan
Li, Zhonghou
ADVANCED RESEARCH IN MATERIAL SCIENCE AND MECHANICAL ENGINEERING, PTS 1 AND 2, 2014, 446-447 : 254 - 258
[3] Effect of Al content on the microstructure of Ti1-xAlxN coating
Wang, Yong-Kang
Xiong, Ren-Zhang
Lei, Ting-Quan
Xia, Li-Fang
Li, Bing-Sheng
Cailiao Gongcheng/Journal of Materials Engineering, 2002, (08):
[4] Evolution of the fracture properties of arc evaporated Ti1-xAlxN coatings with increasing Al content
Waldl, Helene
Tkadletz, Michael
Lechner, Alexandra
Czettl, Christoph
Pohler, Markus
Schalk, Nina
SURFACE & COATINGS TECHNOLOGY, 2022, 444
[5] Hot-pressed Ti-Al targets for synthesizing Ti1-xAlxN films by the arc ion plating method
Kimura, A
Murakami, T
Yamada, K
Suzuki, T
THIN SOLID FILMS, 2001, 382 (1-2) : 101 - 105
[6] Effects of Al Content on the Microstructures and Oxidation Resistance of Cr1-xAlxN films synthesized by Multi-arc Ion Plating Method
Cai, Zhihai
Di, Yuelan
Yang, Zhen
Zhang, Ping
MECHANICAL ENGINEERING AND GREEN MANUFACTURING II, PTS 1 AND 2, 2012, 155-156 : 579 - 584
[7] Growth and mechanical properties of super-hard gradient (Ti, Al, Zr)N coatings by multi-arc ion plating
Cui G.
Zhang J.
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2010, 30 (03): : 329 - 333
[8] Metastable Ti1-xAlxN films with different Al content
Kimura, A
Hasegawa, H
Yamada, K
Suzuki, T
JOURNAL OF MATERIALS SCIENCE LETTERS, 2000, 19 (07) : 601 - 602
[9] Composition, Structure and Properties of the Cr1-xAlxN Hard Films Deposited by Arc Ion Plating
Mo Yajie
Wang Minglei
Chen Weijie
Lin Guoqiang
JOURNAL OF INORGANIC MATERIALS, 2020, 35 (06) : 675 - 681
[10] Effect of Al/Ti ratio on the mechanical properties and tribological behaviours of TiAlN coatings deposited by multi-arc ion plating method
Zhang, J.
Gu, Y.
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY, 2011, 225 (J8) : 854 - 863

← 1 2 3 4 5 →