Characterization of an argon magnetron plasma by a cylindrical Langmuir probe

被引：2
|
作者：
Kim, SY [1 ]
Lee, JS [1 ]
机构：
[1] HANYANG UNIV,DEPT MET & MAT SCI,ANSAN 425791,SOUTH KOREA
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1997年 / 16卷 / 07期
关键词：
D O I：
10.1023/A:1018509603996
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：547 / 549
页数：3
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