Tribological Properties of CrN/TiN Superlattice Coatings Deposited by Deep Oscillation Magnetron Sputtering

被引：0

作者：

Ou Yixiang ^{[1
,2
]}

Wang Haoqi ^{[1
]}

Pang Pan ^{[1
]}

Luo Jun ^{[1
]}

Chen Lin ^{[1
]}

Liao Bin ^{[2
]}

Lei Mingkai ^{[3
]}

Ouyang Xiaoping ^{[2
,4
]}

机构：

[1] Beijing Acad Sci & Technol, Beijing Radiat Ctr, Beijing 100082, Peoples R China

[2] Beijing Normal Univ, Beijing 100875, Peoples R China

[3] Dalian Univ Technol, Dalian 116024, Peoples R China

[4] Northwest Nucl Technol Inst, Xian 710024, Peoples R China

来源：

RARE METAL MATERIALS AND ENGINEERING | 2020年 / 49卷 / 07期

关键词：

deep oscillation magnetron sputtering; CrN/TiN superlattice coatings; adhesion; wear; BEHAVIOR; ADHESION;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Tribological properties of CrN/TiN superlattice coatings deposited on IN 718, WC-6%Co and Si(100) by the combined deep oscillation magnetron sputtering were investigated. The results show that the coating growth is independent of the nature of substrate materials. As the hardness of substrate materials is increased, the scratch critical loads increase. Adhesion failure mode changes from buckling failure to cooperative deformation of substrate/coating system with only small cracks in the whole scratch track. Wear mechanism of the coatings deposited on IN 718 and WC-6%Co changes from abrasive and oxidative wear to mild abrasive wear under a normal load of 2 N. Under a normal load of 4 N, the coatings on IN 718 suffer severe oxidative wear, while the coatings on WC-6%Co suffer the combined abrasive and oxidative wear. The production, accumulation and mass transfer of oxides result in the oscillation of friction coefficient during dry sliding wear tests.

引用

页码：2476 / 2479

页数：4

共 8 条

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