Combining ptychographical algorithms with the Hybrid Input-Output (HIO) algorithm

被引:13
|
作者
Konijnenberg, A. P. [1 ]
Coene, W. M. J. [1 ,2 ]
Pereira, S. F. [1 ]
Urbach, H. P. [1 ]
机构
[1] Delft Univ Technol, Opt Res Grp, NL-2628 CH Delft, Netherlands
[2] ASML Netherlands BV, De Run 6501, NL-5504 DR Veldhoven, Netherlands
关键词
Ptychography; Phase retrieval; PHASE RETRIEVAL; OPTIMIZATION;
D O I
10.1016/j.ultramic.2016.08.020
中图分类号
TH742 [显微镜];
学科分类号
摘要
this article we combine the well-known Ptychographical Iterative Engine (PIE) with the Hybrid Input Output (HIO) algorithm. The important insight is that the HIO feedback function should be kept strictly separate from the reconstructed object, which is done by introducing a separate feedback function per probe position. We have also combined HIO with floating PIE (fPIE) and extended PIE (ePIE). Simulations indicate that the combined algorithm performs significantly better in many situations. Although we have limited our research to a combination with HIO, the same insight can be used to combine ptychographical algorithms with any phase retrieval algorithm that uses a feedback function. (C) 2016 The Authors. Published by Elsevier B.V.
引用
收藏
页码:43 / 54
页数:12
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