Lubrication of digital micromirror devices™

被引：117
|
作者：
Henck, Steven A. [1 ]
机构：
[1] Texas Instruments Inc, Digital Imaging Components, Dallas, TX 75265 USA
来源：
TRIBOLOGY LETTERS | 1997年 / 3卷 / 03期
关键词：
Digital Micromirror Device; DMD; microelectromechanical systems; MEMS; tribology; lubrication; SAM; PFDA; PFPE;
D O I：
10.1023/A:1019129021492
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
Nearly fifty lubricants have been investigated for use in the Digital Micromirror Device (TM) (DMD (TM)). The exploration has ranged from self-assembled monolayers (SAMs), to fluids, to solid lubricants. This paper discusses several of the various approaches that have been taken to lubricate this microelectromechanical systems (MEMS) device and to reduce the adhesion between its contacting surfaces.
引用
收藏
页码：239 / 247
页数：9
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