A Fabry-Perot optical sensor system-on-chip

In this paper, a Fabry-Perot-based system-on-chip optical smart sensor and some of its advantages and applications are discussed. Basics of optical sensors and light-intensity modulations, with regard to the smart sensor, are discussed The CMOS/MEMS implementation and fabrication of a Fabry-Perot system-on-chip and its companion photodiode are shown. This companion photodiode of Fabry-Perot converts the filtered light intensity into an electrical signal. An on-chip CMOS integrated circuit is designed for the signal conditioning and processing of the photodiode electrical signal. Using the CMOS integrated circuit, the analogue signal is converted into a digital form and is available in an 8-bit bus for further processing.