Influence of tilt on collinear calibration of a laser interferometer

被引：9
|
作者：
Tang, Shanzhi [1 ]
Wang, Zhao [1 ]
Gao, Jianmin [2 ]
Zhong, Lihong [1 ]
机构：
[1] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Shaanxi, Peoples R China
[2] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
来源：
APPLIED OPTICS | 2013年 / 52卷 / 04期
关键词：
PLANE MIRROR INTERFEROMETER; MICHELSON INTERFEROMETER; PATHS; ANGLE;
D O I：
10.1364/AO.52.000B46
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Collinear calibration is a typical and common method for a laser (heterodyne) interferometer, but it usually suffers from the influence of the tilt of the target retroreflectors and the dissymmetry of the optical paths during the calibration. This paper mainly analyzes and models the calibration error caused by the tilt error of the target retroreflectors and reveals the error source that is the disturbance from the rotary error of the guideway slider pair. Experimental results prove the validity of the analysis and model of the calibration error. The calibration error is up to 0.5 mu m when the tilt error is 0.36 degrees, which is large enough to equal the maximum tolerance of laser interferometer (0.5 mu m) in use. (C) 2013 Optical Society of America
引用
收藏
页码：B46 / B51
页数：6
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