Non-contacting measurement system design of ultra-precision aspheric surface

被引：0
|
作者：
Liu, JC [1 ]
Guo, YB [1 ]
Huang, J [1 ]
Liu, GJ [1 ]
机构：
[1] Xiamen Univ, Dept Mech & Elect Engn, Xiamen 361005, Peoples R China
来源：
2ND INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, PTS 1 AND 2 | 2006年 / 6150卷
关键词：
aspheric mirror; accuracy measurement; laser sensor; fitting algorithm;
D O I：
10.1117/12.676942
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Aiming at various influential factors during the ultra-precision aspheric surface testing, this paper introduces an aspheric measurement technique based on the high accuracy and non-contacting measuring equipment of laser. To form the platform of four-dimension control system, the measuring instrument of laser is used to realize on-line testing process error of aspheric mirror, and the results of measurement provide error data for compensation processing. To build testing and controlling mathematical model and to design the measurement of ultra-precision aspheric workpiece, the method of compensation based on analyzing the reason of non-contacting error comes into being and the finest way of processing data is given. With full automatic measuring and data processing of the system, error analyzing, displaying could be realized, and data could be provided for compensation processing to processing system.
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页数：6
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