Variability Study for Low-Voltage Microelectromechanical Relay Operation

被引：6

作者：

Osoba, Benjamin ^{[1
]}

Saha, Bivas ^{[2
]}

Almeida, Sergio F. ^{[1
]}

Patil, Jatin ^{[3
]}

Brandt, Laura E. ^{[1
]}

Roots, Maurice E. D. ^{[4
]}

Acosta, Edgar ^{[5
]}

Wu, Junqiao ^{[2
]}

Liu, Tsu-Jae King ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA

[3] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada

[4] Hampton Univ, Dept Phys, Hampton, VA 23668 USA

[5] Univ Texas El Paso, Dept Elect & Comp Engn, El Paso, TX 79968 USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2018年 / 65卷 / 04期

基金：

美国国家科学基金会;

关键词：

Antistiction; body bias; microelectro-mechanical (MEM) relay; molecular coating; perfluoroo-ctyltriethoxysilane (PFOTES); process-induced variation; switching stability; variability; NEGATIVE CAPACITANCE;

D O I：

10.1109/TED.2018.2807409

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Body-biased microelectromechanical relays previously have been developed for ultralow-power digital logic applications and demonstrated to reliably switch ON/OFF with sub-50-mV gate voltage swing. Since variability in relay switching voltages can practically limit reduction in the operating voltage of a relay-based integrated circuit, the effects of process-induced variations and device operating conditions, as well as the stability of relay switching voltages, are investigated in this paper. Antistiction coating is shown to stably reduce hysteresis voltage and random variation thereof, which is beneficial for voltage scaling.

引用

页码：1529 / 1534

页数：6

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