Prospects for SiGe Thermoelectric Generators

被引：0

作者：

Paul, D. J. ^{[1
]}

Samarelli, A. ^{[1
]}

Llin, L. Ferre ^{[1
]}

Watling, J. R. ^{[1
]}

Zhang, Y. ^{[1
]}

Weaver, J. M. R. ^{[1
]}

Dobson, P. S. ^{[1
]}

Cecchi, S.

Frigerio, J.

Isa, F.

Chrastina, D.

Isella, G.

Etzelstorfer, T.

Stangl, J.

Gubler, E. Mueller

机构：

[1] Univ Glasgow, Sch Engn, Glasgow G12 8LT, Lanark, Scotland

来源：

2013 14TH INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (ULIS) | 2013年

关键词：

QUANTUM-WELL; GERMANIUM; FIGURE; MERIT;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thermoelectric materials are one potential technology that could be used for energy harvesting. Here we report results from nanoscale Ge/SiGe heterostructure materials grown on Si substrates designed to enhance the thermoelectric performance at room temperature. The materials and devices are aimed at integrated energy harvesters for autonomous sensing applications. We report Seebeck coefficients up to 279.5 +/- 1.2 mu V/K at room temperature with electrical conductivities of 77,200 Sim which produce a high power factor of 6.02 +/- 0.05 mWm(-1)K(-2) and a ZT of 0.135 +/- 0.074 at room temperature. Methods for microfabricating modules will be described along with the first demonstration of power output from flip-chip bonded SiGe legs.

引用

页码：5 / 8

页数：4

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