The convex grating with high efficiency for Hyperspectral Remote Sensing

被引:2
|
作者
Liu Quan [1 ,2 ,3 ,4 ]
Wu Jianhong [1 ,2 ,3 ,4 ]
Zhou Yang [1 ,2 ]
Gao Fei [1 ,2 ]
机构
[1] Soochow Univ, Coll Phys Optoelect & Energy, Suzhou 215006, Peoples R China
[2] Soochow Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Suzhou 215006, Peoples R China
[3] Soochow Univ, Key Lab Adv Opt Mfg Technol Jiangsu Prov, Educ Minist China, Suzhou 215006, Peoples R China
[4] Soochow Univ, Key Lab Modern Optic Technol, Educ Minist China, Suzhou 215006, Peoples R China
关键词
Diffraction gratings; convex grating; holographic lithography; ion beam etching; diffraction efficiency;
D O I
10.1117/12.2247173
中图分类号
X [环境科学、安全科学];
学科分类号
08 ; 0830 ;
摘要
The convex grating is one of the key elements in Offner imaging spectrometers. In this paper the diffraction efficiency of the convex grating is investigated by using rigorous coupled-wave analysis (RCWA), which indicates that within the visible and near infrared broadband, the first-order diffraction efficiency can be over 40% through controlling the blaze angle of blazed convex grating. The blazed convex grating with the period of 6.17 mu m in the center, the blaze angle about 2.9 degree, the antiblaze angle about 21 degree, and the ruled area - a convex substrate with its radius 36.31mm and aperture 23.6mm has been fabricated by holographic lithography -scan ion beam etching. Experimental measurements show that the first-order diffraction efficiency is more than 30%, and the first-order diffraction efficiency at blazed wavelength can reach 62%.
引用
收藏
页数:7
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