ANALYTICAL COMPACT MODEL FOR OPTO-MECHANICAL SENSOR

被引:0
|
作者
Dawale, Houssein Elmi [1 ]
Jourdan, Guillaume
Sibeud, Loic
Regord, Sebastien
Lamberti, Fabrice
Hentz, Sebastien
Badets, Franck
机构
[1] Univ Grenoble Alpes, F-38400 Grenoble, France
关键词
Opto-mechanical transducer; Mass and Biological sensing; Analytical Compact model; Thermo-optical effect;
D O I
10.1109/mems46641.2020.9056258
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Opto-mechanical resonators have demonstrated over the past decade their tremendous potential for mass and chemical detection. The transducer is able to resonate both in the air and in a liquid environment and presents a very low level of noise, a very high optical quality factor and an excellent density of integration. Currently, the readout electronics available for opto-mechanical transducers are mainly bulky laboratory equipment and it is necessary to integrate them. This paper presents a compact analytical model of an opto-mechanical system implemented in Simulink and compatible with electrical simulator to ease the design of electronic readout circuits. The proposed model describes both the optical and mechanical behavior, as well as opto-mechanical coupling. It also integrates thermo-optical effect and is in good agreement with experimental measurements.
引用
收藏
页码:869 / 872
页数:4
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