A 3-axis accelerometer and strain sensor system for building integrity monitoring

被引：17

作者：

Santana, J. ^{[1
]}

van den Hoven, R. ^{[1
]}

van Liempd, C. ^{[1
]}

Colin, M. ^{[2
]}

Saillen, N. ^{[3
]}

Zonta, D.

Trapani, D. ^{[4
]}

Torfs, T. ^{[5
]}

Van Hoof, C. ^{[1
,6
,7
,8
]}

机构：

[1] IMEC, Holst Ctr, Eindhoven, Netherlands

[2] MEMSCAP, Grenoble, France

[3] Thermo Fisher Sci, Enschede, Netherlands

[4] Univ Trento, Intelligent Infrastructure Grp, Lab Validat Smart Sensor Technol, Trento, Italy

[5] IMEC, Sensor Elect Grp, Louvain, Belgium

[6] IMEC, Detector Syst Grp, Louvain, Belgium

[7] IMEC, Microsyst Dept, Louvain, Belgium

[8] IMEC, Integrated Syst Dept, Louvain, Belgium

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2012年 / 188卷

关键词：

Signal-to-Noise ratio; Linearity; Bandwidth; Sensitivity; Integrated number of pulses; Residual motion;

D O I：

10.1016/j.sna.2011.11.017

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An Ultra-Low-Power readout architecture for capacitive MEMS-based accelerometers and strain sensors is presented. The system can read both accelerometers and strain sensors in a half-bridge configuration. An accurate VerilogA model of the sensor was made to improve simulations. The gain of the system is controlled by integrating pulses from the excitation circuit allowing accurate control of the Signal-to-Noise ratio. A Figure-of-Merit of 4.41 x 10(-20) F root(W/Hz) was achieved for a sensor range of +/- 2.0 g and +/- 20,000 mu epsilon over a 100 Hz bandwidth. A minimum of 440 nW powerconsumption was recorded. Residual motion artifacts are also cancelled by the system. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：141 / 147

页数：7

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