Application of Surface Acoustic Wave Devices for Acceleration Sensing

被引：0
|
作者：
Lukyanov, D. [1 ]
Shevchenko, S. [1 ]
Kukaev, A. [1 ]
Filippova, E. [1 ]
Khivrich, M. [1 ]
机构：
[1] St Petersburg Electrotech Univ, Dept Laser Measurement & Nav Syst, St Petersburg, Russia
来源：
2014 INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING, AUTOMATION AND CONTROL SYSTEMS (MEACS) | 2014年
关键词：
micromechanical accelerometer (MMA); sUrface acoustic wave (SAW); quartz packaging; laser frequency adjustment;
D O I：
10.1109/meacs.2014.6986931
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The fundamentals of the theory of surface acoustic waves (SAW) and the principles of construction of frequency differential converters on SAW are presented. SAW-based microaccelerometer design concept is discussed. Calculation of the micro accelerometer console optimal form for reducing the technological errors effect is completed. The technology of quartz packaging, the possibility of laser frequency adjustment and simultaneous formation of the resonator structures on the opposite sides of the console with the use of a laser are considered.(1)
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页数：5
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