The end of the road for silicon?

被引：252

作者：

Schulz, M ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Inst Appl Phys, D-91058 Erlangen, Germany

来源：

NATURE | 1999年 / 399卷 / 6738期

关键词：

D O I：

10.1038/21526

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Computer chips continue to shrink. But the discovery that a layer of silicon dioxide must be at least four to five atoms thick to function as an insulator suggests that silicon-based microchips will reach the physical limits of miniaturization early next century.

引用

页码：729 / 730

页数：2

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