Research of pulse CO2 Laser produced tin plasma

被引：1
|
作者：
Wu Tao [1 ]
Wang Xinbing [1 ]
Zuo DouLuo [1 ]
Lu Peixiang
机构：
[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China
来源：
HIGH-POWER LASER MATERIALS PROCESSING: LASERS, BEAM DELIVERY, DIAGNOSTICS, AND APPLICATIONS II | 2013年 / 8603卷
关键词：
CO2 laser plasma; Tin; extreme ultraviolet; emission spectroscopy; debris mitigation; LITHOGRAPHY;
D O I：
10.1117/12.2002924
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Experiments of pulse CO2 laser produced tin plasma had been carried out. Plasma parameters of electron temperature and density measurements both in axial and radial direction had been performed from a two-dimensional time and space resolved image spectra analysis. Debris speed of laser produced plasma in various buffer gas was quantitatively estimated by means of a fast gated intensified charge coupled device imaging system. The stopping power of the hydrogen buffer gas was assessed under ambient pressure ranging from 30 to 10(4) Pa.
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页数：8
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