Enhanced Open Innovation: CMP Innovation to Open New Paradigm

The history of miniaturization of semiconductors, which has been supported by Dennard's theory and developed in accordance with Moore's law, has entered the new era of A, and the market is expected to grow explosively beyond the conventional market mechanisms. Semiconductor technology has always faced developing technical challenges, each of which has been overcome by a newly proposed innovation. Even now, a sense of stagnation about the future technology is pervasive. On the other hand, the market is expected to grow explosively due to a shift from single driver technology, including PCs and mobile phones, to multi-driver technology including ICAC5 (IoT, cloud, AI, cars, and 5G). This paper covers a method of development through Enhanced Open Innovation, which is an advanced form of Open Innovation, as a method for overcoming the sense of stagnation about the future technology and responding to the explosively growing market. In preparation for the paradigm revolution of semiconductors that is expected to occur in 2030, CMP needs to be advanced in terms of hardware as well as software. Manabu's principle "Semiconductor device technology is immortal as long as there are human desires" is about to be proved. (C) The Author(s) 2019. Published by ECS.