Field emission measured from nanostructured germanium and silicon thin films

被引:3
|
作者
Carder, D. A. [1 ]
Markwitz, A. [1 ]
机构
[1] GNS Sci, Natl Isotope Ctr, Lower Hutt, New Zealand
关键词
Field emission; Nanostructures; Ion beam sputtering; Electron beam annealing; Silicon; Germanium; SELF-ASSEMBLED SILICON; ARRAYS;
D O I
10.1016/j.apsusc.2009.05.066
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have prepared nanostructured thin films of germanium and silicon. The films were grown by an ion beam sputtering technique followed by a rapid annealing step using an electron beam annealer. The annealing temperature is a comparatively low 500 degrees C, resulting in well defined nano-islands on the film surface. Electron field emission has beenmeasured from the surfaces under high vacuum. The threshold electric field value for significant current flow was measured as 2.5 V mu m (1) for a silicon thin film which is comparable to other silicon technologies. A value of 0.5 V mu m (1) for a germanium thin film represents an order of magnitude improvement for related germanium nanostructured systems. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:1003 / 1005
页数:3
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