Characterization of ZnO:Al layers for applications in thin film solar cells

被引：6
|
作者：
Zdyb, Agata [1 ]
Krawczak, Ewelina [1 ]
Lichograj, Piotr [2 ]
机构：
[1] Lublin Univ Technol, Fac Environm Engn, Lublin, Poland
[2] Pope John Paul II State Sch Higher Educ Biala Pod, Fac Econ & Tech Sci, Biala Podlaska, Poland
来源：
OPTICA APPLICATA | 2016年 / 46卷 / 02期
关键词：
transparent conductive oxide; magnetron sputtering; thin film solar cell; BACK REFLECTORS; OPTICAL-CONSTANTS; THICKNESS;
D O I：
10.5277/oa160203
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Thin films of zinc oxide doped with aluminium were obtained by using the magnetron sputtering technique on glass substrates. The changes in magnetron power influence the structural, optical and electrical properties of the ZnO:Al layers. The deposited films are characterized by very good homogeneity and high optical transmission. Thicker films with larger agglomerates on the surface exhibit lower resistivity with the remaining good transparency.
引用
收藏
页码：181 / 185
页数：5
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