Research on Rapid Repairing of Surface Laser Damage of Fused Silica Optics

被引：3
|
作者：
Zhang Yaofei [1 ,2 ,3 ]
Song Ci [1 ,2 ,3 ]
Shi Feng [1 ,2 ,3 ]
Tian Ye [1 ,2 ,3 ]
Lin Zhifan [1 ,2 ,3 ]
机构：
[1] Natl Univ Def Techol, Coll Intelligent Sci, Changsha, Hunan, Peoples R China
[2] Hunan Key Lab Ultraprecis Machining Technol, Changsha, Hunan, Peoples R China
[3] Natl Univ Def Technol, Lab Sci & Technol Integrated Logist Support, Changsha, Hunan, Peoples R China
来源：
SECOND TARGET RECOGNITION AND ARTIFICIAL INTELLIGENCE SUMMIT FORUM | 2020年 / 11427卷
关键词：
Fused silica; magnetorheological; CCOS;
D O I：
10.1117/12.2553183
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
To realize the rapid repairing of surface damage of fused silica optics, a method combining magnetorheological and Computer controlled optical surface (CCOS) was proposed to quickly remove small size damage points on the surface of damaged fused silica optics. In this paper, the size and number of damage points on the surface of fused silica optics are analyzed. Meanwhile, the surface of the fused silica optics is evenly removed by the magnetorheological technology, and the change rule of damage points on the surface of fused silica optics is analyzed. After that, CCOS smoothing technology is used to restore the surface quality of the optics. The experimental results show that the combined technology can effectively remove the small size damage points on the surface of fused silica optics and maintain the surface quality of the optics, achieving a good repair effect.
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收藏
页数：7
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