INNOVATIVE DESIGN OF PIEZOELECTRIC MICROPUMP BASED ON MICRO-NANO ADDITIVE MANUFACTURING

Since the 1990s, microfluidic technology has developed rapidly. However, subject to the limitations of traditional microfluidic device manufacturing methods, traditional microfluidic devices have long manufacturing cycles and high manufacturing costs. Micro-nano additive manufacturing is an important direction to break through the limitations of traditional microfluidic device manufacturing. In this paper, the micropump in the microfluidic device is taken as an example. By using the innovative design method of analog design, the "Automobile engine type micropump system" is proposed in this paper. Through the analysis of the relevant simulation results, the following conclusions can be drawn. The "Automobile engine type micropump structure" can significantly improve the smoothness of the output flow of the micropump. It is composed of basic structural units. By turning on or off the independent drive voltage, this micropump can generate seven different flow rates as outputs, thereby improving the compatibility of the micropump structure.