A review of high-voltage integrated power device for AC/DC switching application

被引:5
|
作者
Qiao, Ming [1 ]
Liang, Longfei [1 ]
Zu, Jian [1 ]
Hou, Dican [1 ]
Li, Zhaoji [1 ]
Zhang, Bo [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
基金
中国国家自然科学基金;
关键词
DOUBLE RESURF LDMOS; ON-RESISTANCE; LATERAL IGBT; DB-NLDMOS; SOI LDMOS; THIN SOI; BULK SI; DESIGN; OPTIMIZATION; TECHNOLOGY;
D O I
10.1016/j.mee.2020.111416
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High-voltage (HV) integrated power devices are widely used in many applications, including alternating current/direct current (AC/DC) power converter, HV gate driver integrated circuit (IC) and light emitting diode (LED) driver IC, etc. Among these applications, AC/DC power converter is essential for almost all power systems operated in the DC conditions. As a power switch in the AC/DC converter, the fundamental performance requirement of these power devices is to withstand a high voltage of 500-900 V and simultaneously have a low power loss for its efficient conversion. Therefore, several device technologies have been proposed to realize a high breakdown voltage (BV) and a low specific on-resistance (R-on,R- sp), such as reduced surface field (RESURF) technology, lateral super junction (SJ) structure, lateral insulated-gate bipolar transistor (LIGBT), integrated vertical structure and junction termination technology. In this paper, a comprehensive review of the development and prospect of these technologies in AC/DC switching application is presented. Furthermore, analytic R-on,R- sp-BV models for some typical device structures, the possible strategies of Bipolar - Complementary metal oxide semiconductor - Double-diffused metal oxide semiconductor (BCD) platform integrated with vertical SJ devices, partial silicon-on-insulator (SOI) BCD technology, low gate charge (Q(g)) HV integrated power devices and wide bandgap technology are also described.
引用
收藏
页数:11
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