The Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations

被引：0

作者：

Schulz, Christian ^{[1
]}

Rolfes, Ilona ^{[1
]}

Styrnoll, Tim ^{[4
]}

Awakowicz, Peter ^{[4
]}

Lapke, Martin ^{[3
]}

Oberrath, Jens ^{[3
]}

Mussenbrock, Thomas ^{[3
]}

Brinkmann, Ralf Peter ^{[3
]}

Storch, Robert ^{[2
]}

Musch, Thomas ^{[2
]}

机构：

[1] Ruhr Univ Bochum, Inst Microwave Syst, D-44801 Bochum, Germany

[2] Ruhr Univ Bochum, Inst Elect Circuits, D-44801 Bochum, Germany

[3] Ruhr Univ Bochum, Inst Theoret Elect Engn, D-44801 Bochum, Germany

[4] Ruhr Univ Bochum, Inst Elect Engn, D-44801 Bochum, Germany

来源：

2012 42ND EUROPEAN MICROWAVE CONFERENCE (EUMC) | 2012年

关键词：

3D-electromagnetic field simulation; active plasma resonance spectroscopy; plasma diagnostics; multipole resonance probe;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe.

引用

页码：566 / 569

页数：4

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