Thin film thickness measurement based on laser heterodyne interferometry

被引：0
|
作者：
Shi Kai [1 ,2 ]
Su Junhong [1 ,2 ]
机构：
[1] Xian Technol Univ, Sch Optoelect Engn, 2 Xuefu Rd, Xian 710021, Shaanxi, Peoples R China
[2] Xian Technol Univ, Shaanxi Key Lab Photoelect Measurement & Instrume, 2 Xuefu Rd, Xian 710021, Shaanxi, Peoples R China
来源：
9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): OPTICAL TEST, MEASUREMENT TECHNOLOGY, AND EQUIPMENT | 2019年 / 10839卷
关键词：
laser interferometry; heterodyne; thin film thickness; measurement;
D O I：
10.1117/12.2506460
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
For the difficulty of measuring thin film thickness, a method of thin film thickness measurement based on laser heterodyne interferometry is proposed. Thin film difference of this method is generated by the relative optical path difference of Michelson interference light path with principle of heterodyne interference. The thickness is got by precision displacement table in line-by-line scaning. The shift of measurement system is about 8nm with constant temperature. Average deviation of measuring results is about 5nm. The comparison with ellipsometer shows the correctness of the method.
引用
收藏
页数：7
相关论文
共 50 条
  • [1] Thin film thickness measurement by double laser interferometry
    Domingo, M.
    Millan, C.
    Satorre, M. A.
    Canto, J.
    [J]. OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION V, PTS 1 AND 2, 2007, 6616 : A6164 - A6164
  • [2] Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry
    Hsu, CC
    Lee, JY
    Su, DC
    [J]. THIN SOLID FILMS, 2005, 491 (1-2) : 91 - 95
  • [3] THE MEASUREMENT OF THIN FILM THICKNESS BY INTERFEROMETRY
    TOLANSKY, S
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1951, 41 (06) : 425 - 426
  • [4] Measurement of thin liquid film thickness in pipes based on optical interferometry
    Ting Xue
    Yan Wu
    [J]. Optoelectronics Letters, 2022, 18 : 489 - 494
  • [5] Measurement of thin liquid film thickness in pipes based on optical interferometry
    Xue, Ting
    Wu, Yan
    [J]. OPTOELECTRONICS LETTERS, 2022, 18 (08) : 489 - 494
  • [6] Measurement of thin liquid film thickness in pipes based on optical interferometry
    XUE Ting
    WU Yan
    [J]. Optoelectronics Letters, 2022, (08) : 489 - 494
  • [7] Optical Constant Measurement of GOx Thin Film with Circular Heterodyne Interferometry
    Chang, Hsiang
    Chen, Shu-Yu
    Lee, Chia-Yun
    Hsu, Cheng-Chih
    [J]. 2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR), 2013,
  • [8] Measurement of liquid-film thickness by laser interferometry
    Nozhat, WM
    [J]. APPLIED OPTICS, 1997, 36 (30): : 7864 - 7869
  • [9] Application of Optical Spectral Interferometry for Thin Film Thickness Measurement
    Lukin, Konstantin A.
    Tatyanko, Dmytro N.
    Pikh, Alona B.
    [J]. 2016 9TH INTERNATIONAL KHARKIV SYMPOSIUM ON PHYSICS AND ENGINEERING OF MICROWAVES, MILLIMETER AND SUBMILLIMETER WAVES (MSMW), 2016,
  • [10] Measurement of thin film thickness by electronic speckle pattern interferometry
    Karaalioglu, C
    Skarlatos, Y
    [J]. OPTICS COMMUNICATIONS, 2004, 234 (1-6) : 269 - 276
12345