SnO2, SnO2/Ag and Ag/SnO2 thin rilms used as propane sensors

被引:0
|
作者
Aguilar, J [1 ]
de la L Olvera, M [1 ]
Maldonado, A [1 ]
机构
[1] Inst Politecn Nacl, CINVESTAV, Dept Ingn Elect, Mexico City 07000, DF, Mexico
关键词
thin films; gas sensors; propane; tin oxide;
D O I
10.1109/ICEEE.2005.1529620
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Three different structures SnO2, SnO2/Ag and Ag/SnO2 on glass substrates were performed. The SnO2 and Ag films were deposited by the chemical spray technique (spray pyrolysis), and vacuum evaporation, respectively. In this work the films sensitivity in a propane atmosphere, C3H8, at different operation temperatures are reported. According to our results the SnO2/Ag structure showed the highest sensitivity.
引用
收藏
页码:250 / 253
页数:4
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