Closed-loop high-precision position control system with two modes

被引：0

作者：

Ge Cheng-liang ^{[1
,2
]}

Fan Guo-bin ^{[2
]}

Huang Zhi-wei ^{[2
]}

Liu Zhi-qiang ^{[2
]}

Li Zheng-dong ^{[2
]}

Wu Jian-tao ^{[2
]}

Wan Min ^{[2
]}

Hu Xiao-yang ^{[2
]}

Liang Zheng ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, Coll Phys Elect, Chengdu 610054, Peoples R China

[2] CAEP, Inst Appl Elect, Sichuan Mianyang 621900, Peoples R China

来源：

OPTICAL SYSTEM ALIGNMENT AND TOLERANCING II | 2008年 / 7068卷

关键词：

optical grating; position control; PID;

D O I：

10.1117/12.792317

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Based on fine optical grating and micrometer, one closed-loop high-precision position control system with two modes has been made. The system is used to control the optical elements moving in two ways. That is, one control mode is automatically control with optical grating feedback system and the other mode is manually control with micrometer. Under the support of conservative PID control algorithm, the precision of the system is up to +/- 0.1 mu m while operating on automatically way, otherwise, the position precision is +/- 1 mu m.

引用

页数：8

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