Integrated Thin Film Silicon Detectors for Fluorescence Sensing

被引：0

作者：

Dighe, Aditi ^{[1
]}

Jokerst, Nan M. ^{[1
]}

机构：

[1] Duke Univ, Dept Elect & Comp Engn, Durham, NC 27708 USA

来源：

2018 IEEE SENSORS | 2018年

基金：

美国国家科学基金会;

关键词：

photodetector; thin film; fluorescence; sensing; SENSOR;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design, fabrication and test of a thin film Si chip-scale fluorescence sensor designed for integration with microfluidic systems is reported. The photodetector has low dark current (pA) and responsivity of 0.3 A/W at 532 am. Droplets of 10 microliter with varying fluorophore concentrations were tested and the data is linear with a model fit with 95% confidence and signal to noise ratios greater than 20 dB.

引用

页码：721 / 724

页数：4

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