Structural formation of the lead zirconate titanate in use of pulsed-laser ablation deposition

被引：7
|
作者：
Ichiki, M [1 ]
Zhang, L [1 ]
Wang, Z [1 ]
Morikawa, Y [1 ]
Tanaka, M [1 ]
Maeda, R [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan
来源：
COMPLEX MEDIUMS II: BEYOND LINEAR ISOTROPIC DIELECTRICS | 2001年 / 4467卷
关键词：
pulsed laser ablation deposition; lead zirconate titanate; X-ray diffraction; perovskite structure; heat treatment; film formation; micro elecro-mechanical system; PZT; post annealing; PLAD;
D O I：
10.1117/12.432952
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper reports the structural properties of lead zirconate titanate system formed in pulsed laser ablation deposition method. X-ray diffraction and scanning electron microscope was used for surface and the crystalline structure observation. The target material is prepared in conventional solid state reaction method using oxide powder. Formed lead zirconate titanate film has amorphous structure in as-deposited condition. Post-annealing treatment between 600 degreesC and 900 degreesC was carried out after deposition. Perovskite structure was formed on the Pt/Ti/SiO2/Si substrate after annealing treatment in all cases. The formed film has flat surface and homogeneous structure observed by scanning electron microscope.
引用
收藏
页码：387 / 394
页数：8
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