Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral Density

Vibration in ultra-precision machining is an inherent physical phenomenon and a key factor affecting surface generation. However, the influence of the vibration characteristics of aerostatic guideways on the machining morphology has not been fully studied. In this article, a diamond micro-planing experiment was carried out on an oxygen-free copper workpiece using a homemade three-axis machine tool, and a white-light interferometer was used to measure the surface topography of the planing surface. The power spectral density of the surface topography was analyzed, and the spatial wavelength components of the surface topography were extracted. Then, the vibration characteristics of the aerostatic guideway were measured in both the space domain and the time domain. A comprehensive analysis of the main components of the workpiece surface error morphology and the vibration characteristics of the guideway shows that the time-domain vibration of the aerostatic guideway is the main factor causing the surface topography error of the workpiece.