Effect of Ag adsorption on the structure and morphology of vicinal Si(111) surfaces

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作者
Dolbak, AE [1 ]
Olshanetsky, BZ [1 ]
Zhachuk, RA [1 ]
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[1] Russian Acad Sci, Inst Semicond Phys, Siberian Branch, Novosibirsk 630090, Russia
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O59 [应用物理学];
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摘要
Effects of Ag adsorption on the structure and morphology of the vicinal Si(111) surfaces misoriented towards the [11(2) over bar] and [<(11)over bar 2>] directions have been studied by low energy electron diffraction and Anger electron spectroscopy. It has been shown that Ag adsorption causes the separation of the vicinal Si(111) surfaces into faceted configuration. On the surfaces inclined towards the [11(2) over bar] direction the facets (111), (551) and (110) form. The structure of the (111) facet depends on the Ag coverage value theta(Ag) and fits in with those observed previously on singular Si(111) surface. Two other facets have the 8x1-Ag and 1x2-Ag surface structures respectively. The surfaces inclined towards the [<(11)over bar 2>] direction separate into the (111), (311) and (322) facets. The latter two facets have the 3x1-Ag and the 2x1-Ag structure, respectively. The (331) surface is also unstable towards Ag adsorption and breaks into the (111) and (110) facets.
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页码:163 / 173
页数:11
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