共 50 条
- [2] Electro-chemical mechanical polishing of silicon carbide [J]. Journal of Electronic Materials, 2004, 33 : 481 - 486
- [3] Anisotropy of chemical mechanical polishing in silicon carbide substrates [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2007, 142 (01): : 28 - 30
- [4] Electro-chemical mechanical polishing of silicon carbide [J]. SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2, 2004, 457-460 : 801 - 804
- [5] Ultrasonic Vibration Assisted Mechanical Chemical Polishing (MCP) of Silicon Carbide [J]. ADVANCES IN ABRASIVE TECHNOLOGY XV, 2012, 565 : 255 - +
- [6] An overview of recent advances in chemical mechanical polishing (CMP) of sapphire substrates [J]. CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2013 (CSTIC 2013), 2013, 52 (01): : 495 - 500
- [9] Computer-controlled chemical mechanical polishing of silicon modification layer on aspheric silicon carbide surface [J]. Zhang, F. (zhangfiyz@sina.cn), 1600, Chinese Academy of Sciences (21):
- [10] Compound mechanical and chemical-mechanical polishing processing technique for single-crystal silicon carbide [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2024, 86 : 160 - 169