[1] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[2] Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton WPI MANA, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
[3] Tsinghua Univ, Dept Engn Mech, Beijing 100084, Peoples R China
[4] Tsinghua Univ, Ctr Nano & Micro Mech, Beijing 100084, Peoples R China