Evaluation of the polarization state of integrated piezoelectric sensors and actuators using the thermal wave method

被引：1
|
作者：
Eydam, Agnes [1 ]
Suchaneck, Gunnar [1 ]
Gerlach, Gerald [1 ]
机构：
[1] Tech Univ Dresden, Solid State Elect Lab, D-01062 Dresden, Germany
来源：
MATERIALS AND APPLICATIONS FOR SENSORS AND TRANSDUCERS II | 2013年 / 543卷
关键词：
integrated piezoceramics; piezoelectric polarization; thermal wave method; FILMS;
D O I：
10.4028/www.scientific.net/KEM.543.503
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this work, we investigate the polarization state of a Low-Temperature-Cofired-Ceramics (LTCC)/PZT sensor-actuator and a Macro-Fiber Composite (MFC) actuator. An analytical solution for a 1-D thermal problem was derived for an embedded piezoelectric plate. Transient thermal analysis of the more complicated MFC actuator was performed using finite element modelling. At modulation frequencies below 10 Hz both modules are well described by a harmonically heated piezoelectric plate exhibiting heat losses to the environment.
引用
收藏
页码：503 / 506
页数：4
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