Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

Merging two state-of-the-art surface research techniques, in particular, atomic force microscopy (AFM) and scanning electron microscopy (SEM), within a single system is providing novel capabilities like direct visual feedback and life-monitoring of tip-induced nanoscale interactions. In addition, the combination of AFM and SEM accelerates nanoscale characterization and metrology development. Here, the concept and first results of a novel AFM-integration into a high resolution scanning electron microscope and focused ion beam system for nanoscale characterization is presented. In this context, a six-axis AFM system using self-sensing thermomechanically transduced active cantilever was developed and integrated. The design of the developed AFM-integration is described and its performance is demonstrated. Results from combined examinations applying fast AFM-methods and SEM-image fusion, AFM-SEM combined metrology verification, and three dimensional-visualization are shown. Simultaneous operation of SEM and AFM provides a fast navigation combined with sub-10nm topographic image acquisition. Metrology application scenarios of combined studies are discussed, for example of MoS2 and diverse metrological test structures. (C) 2016 American Vacuum Society.