Monolithically integrated asymmetric graded and step-index couplers for microphotonic waveguides

被引：23
|
作者：
Delâge, A [1 ]
Janz, S [1 ]
Lamontagne, B [1 ]
Bogdanov, A [1 ]
Dalacu, D [1 ]
Xu, DX [1 ]
Yap, KP [1 ]
机构：
[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada
来源：
OPTICS EXPRESS | 2006年 / 14卷 / 01期
关键词：
D O I：
10.1364/OPEX.14.000148
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A monolithically integrated asymmetric graded index (GRIN) or step-index (GRIN) mode converters for microphotonic waveguides are proposed and described. The design parameters and tolerances are calculated for amorphous silicon (a-Si) couplers integrated with silicon-on-insulator waveguides. The GRIN and step-index couplers operate over a wide wavelength range with low polarization dependence, and the lithographic resolution needed is only +/- 1 mu m. Finally, experimental results are presented for a single layer 3 mu m thick step-index a-Si coupler integrated on a 0.8 mu m thick SOI waveguide. The measured variation of coupling efficiency with coupler length is in agreement with theory, with an optimal coupling length of 15 mu m for this device. (c) 2005 Optical Society of America.
引用
收藏
页码：148 / 161
页数：14
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