Silicon Photonic Integrated Circuits for Optical Coherence Tomography

被引:0
|
作者
Freude, W. [1 ]
Schneider, S. [1 ]
Lauermann, M. [1 ]
Dietrich, P. -I. [1 ,2 ]
Weimann, C. [1 ]
Koos, C. [1 ,2 ]
机构
[1] Karlsruhe Inst Technol, Inst Photon & Quantum Elect IPQ, D-76021 Karlsruhe, Germany
[2] Karlsruhe Inst Technol, Inst Microstruct Technol, D-76021 Karlsruhe, Germany
关键词
Optical coherence tomography; photonic integrated circuits; sensors; three-dimensional lithography;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Low-cost photonic integrated circuits (PIC) become increasingly important in medical applications like optical coherence tomography (OCT) for eye care and endoscopy as well as in industrial metrology for distance scanning of surfaces and volumes. We report on two OCT systems fully integrated on a silicon-on-insulator (SOI) chip. With an on-chip reference path, we image objects in distances (5...10) mm from the chip edge with a depth resolution of 11 mu m and a dynamic range of 53dB. Employing an off-chip reference path, objects are imaged in distances (8000...8010) mm from the chip with a depth resolution of 30 mu m and a dynamic range of 60dB.
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页数:4
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